-
Browse Book Series
- Adhesion and Adhesives: Fundamental and Applied Aspects
- Advances in Additive Manufacturing Technologies
- Advances in Antenna, Microwave and Communication Engineering
- Advances in Biofeedstocks and Biofuels
- Advances in Cyber Security
- Advances in Data Engineering and Machine Learning
- Advances in E-Mobility
- Advances in Hydrogen Production and Storage
- Advances in Intelligent and Scientific Computing (AISC)
- Advances in Learning Analytics for Intelligent Cloud-IoT Systems
- Advances in Membrane Processes
- Advances in Nanotechnology and Applications
- Advances in Natural Gas Engineering
- Advances in Pipes and Pipelines
- Advances in Production Engineering
- Advances in Solar Cell Materials and Storage
- Applied Functional Materials
- Artificial Intelligence and Soft Computing for Industrial Transformation
- Astrobiology Perspectives on Life in the Universe
- Bioprocessing in Food Science
- Computational Intelligence and Biomedical Engineering
- Concise Introductions to AI and Data Science
- Cyber Systems and Quantum Engineering
- Decentralized Systems and Next-Generation Internet
- Diatoms: Biology and Applications
- Digital Convergence in Engineering Systems
- Emerging Trends in Medicinal and Pharmaceutical Chemistry
- Engineering Systems Design for Sustainable Development
- Fintech in a Sustainable Digital Society
- Industry 5.0 Transformation Applications
- Infectious and Rare Diseases
- Innovations in Materials and Manufacturing
- Machine Learning in Biomedical Science and Healthcare Informatics
- Materials Degradation and Failure
- Mathematics and Computer Science
- Next-Generation Computing and Communication Engineering
- Performability Engineering Series
- Rotating Machinery Fundamentals and Advances
- Studies in Computational Intelligence and Smart Technologies
- Sustainable Computing and Optimization
Browse Subject Areas
For Authors
Submit a ProposalMaterials and Failures in MEMS and NEMS
 | Edited by Atul Tiwari and Baldev Raj Copyright: 2015 | Status: Published ISBN: 9781119083603 | Hardcover | 416 pages Price: $195.00 USD  |
One Line Description
Provides unique and critical information for engineers to gain precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS.
Audience
The book will be read by materials scientists, chemists, engineers, nanotechnologists, etc who work in the interdisciplinary area of science, engineering and technology focused on MEMS & NEMS devices, as well as engineers in industry that manufacture these devices.
The book will be read by materials scientists, chemists, engineers, nanotechnologists, etc who work in the interdisciplinary area of science, engineering and technology focused on MEMS & NEMS devices, as well as engineers in industry that manufacture these devices.
Description
The invention of Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) fabrication technologies has revolutionized the science and engineering industry and it is now estimated it will be valued at $200 billion in 2025. Novel materials and technologies are being explored to overcome the challenges in fabrication or manufacturing processes with the aim to integrate multiple devices on a single chip. This book, which looks at these new materials as well as their failures, includes chapters (amongst others) written by eminent experts in the area of MEMS and NEMS in the following areas:
• C-MEMS fabrication technologies involving patterning of polymeric precursors of carbon
• The design of MEMS heat exchangers such as heat sinks, heat pipes and two-fluid heat exchangers
• MEMS and NEMS switches using Si-to-Si contact.
• Design challenges during fab¬rication and failure analysis of cMUT devices
• The inverse problems in micro- and nanomechanical resonators as well as the stiction test of MEMS and NEMS
• The control of ohmic RF-MEMS switches operating under different actuation modes
• Design methodologies and available simulation packages to model and simulate MEMS devices
• The buckling behavior of a typical micron-scale constantan-wire/polymer-substrate structure under electrical loading
• The inherent challenges encountered in CMOS–MEMS along with the possibility of integration at board and chip levels
• The application of porous silicon in MEMS and sensors technology
• Mathematical models to determine strategies for preventive replacement and inspection for MEMS that are subject to multiple dependent competing failure processes.
Back to Top
The invention of Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) fabrication technologies has revolutionized the science and engineering industry and it is now estimated it will be valued at $200 billion in 2025. Novel materials and technologies are being explored to overcome the challenges in fabrication or manufacturing processes with the aim to integrate multiple devices on a single chip. This book, which looks at these new materials as well as their failures, includes chapters (amongst others) written by eminent experts in the area of MEMS and NEMS in the following areas:
• C-MEMS fabrication technologies involving patterning of polymeric precursors of carbon
• The design of MEMS heat exchangers such as heat sinks, heat pipes and two-fluid heat exchangers
• MEMS and NEMS switches using Si-to-Si contact.
• Design challenges during fab¬rication and failure analysis of cMUT devices
• The inverse problems in micro- and nanomechanical resonators as well as the stiction test of MEMS and NEMS
• The control of ohmic RF-MEMS switches operating under different actuation modes
• Design methodologies and available simulation packages to model and simulate MEMS devices
• The buckling behavior of a typical micron-scale constantan-wire/polymer-substrate structure under electrical loading
• The inherent challenges encountered in CMOS–MEMS along with the possibility of integration at board and chip levels
• The application of porous silicon in MEMS and sensors technology
• Mathematical models to determine strategies for preventive replacement and inspection for MEMS that are subject to multiple dependent competing failure processes.
Back to Top
Author / Editor Details
Atul Tiwari currently serves as Director, Research and Development at Pantheon Chemicals Company in Phoenix, USA. Previously, Dr. Tiwari has served as research faculty member in the Department of Mechanical Engineering at the University of Hawaii, USA. He received his PhD in Polymer Materials Science and second master degree in Mechanical Engineering along with the bestowed Chartered Chemist and Chartered Scientist status from the Royal Society of Chemistry, UK. Being an organic chemist and mechanical engineer his research work tends to bridge the gap between the science and engineering. Dr. Tiwari has published more than 70 peer reviewed research publications including 15 books, as well as 6 international patented/pending technologies that have been transferred to industry. His area of research interest includes the development of smart materials including silicones, graphene and bio-inspired biomaterials for industrial applications.
Atul Tiwari currently serves as Director, Research and Development at Pantheon Chemicals Company in Phoenix, USA. Previously, Dr. Tiwari has served as research faculty member in the Department of Mechanical Engineering at the University of Hawaii, USA. He received his PhD in Polymer Materials Science and second master degree in Mechanical Engineering along with the bestowed Chartered Chemist and Chartered Scientist status from the Royal Society of Chemistry, UK. Being an organic chemist and mechanical engineer his research work tends to bridge the gap between the science and engineering. Dr. Tiwari has published more than 70 peer reviewed research publications including 15 books, as well as 6 international patented/pending technologies that have been transferred to industry. His area of research interest includes the development of smart materials including silicones, graphene and bio-inspired biomaterials for industrial applications.
Baldev Raj is currently Director, National Institute of Advanced Studies, Bangalore after serving as Director of Indira Gandhi Centre of Atomic Research. He has pioneered the application of Non Destructive Evaluation (NDE) for basic research using acoustic and electromagnetic techniques in a variety of materials and components and is an acknowledged expert in Materials, Fast Spectrum Reactors with Closed Fuel Cycle, Heritage and Education. He has been Past-President of the International Institute of Welding and the Indian National Academy of Engineering. He has authored more than 959 publications in refereed journals, 79 books and special journal issues, more than 39 contributions to encyclopaedia and handbooks, and is the owner of 29 patents. He has been recognized with more than 100 international and national awards.
Back to Top