This book covers the state-of-the-art and the fundamentals of silicon wafer solar cells manufacturing, written by world-class researchers and experts in the field.
DescriptionHigh quality and economic photovoltaic manufacturing is central to realizing reliable photovoltaic power supplies at reasonable cost. While photovoltaic silicon wafer manufacturing is at a mature, industrial and mass production stage, knowing and applying the fundamentals in solar manufacturing is essential to anyone working in this field.
This is the first book on photovoltaic wet processing for silicon wafers, both mono- and multi-crystalline. The comprehensive book provides information for process, equipment, and device engineers and researchers in the solar manufacturing field. The authors of the chapters are world-class researchers and experts in their field of endeavor. The fundamentals of wet processing chemistry are introduced, covering etching, texturing, cleaning and metrology. New developments, innovative approaches, as well as current challenges are presented. Benefits of reading the book include:
• The book includes a detailed discussion of the important new development of black silicon, which is considered to have started a new wave in photovoltaics and become the new standard while substantially lowering the cost.
• Photovoltaics are central to any country’s “New Green deal” and this book shows how to manufacture competitively.
• The book’s central goal is to show photovoltaic manufacturing can be done with enhanced quality and lowering costs.
Back to Top Table of ContentsPreface1. Metal-Assisted Chemical Etching of Silicon: Origin, Mechanism, and Black Silicon Solar Cell Applications Chenliang Huo, Jiang Wang, Haoxin Fu and Kui-Qing Peng
1.1 Introduction
1.2 History and Mechanism of Metal-Assisted Chemical Etching of Silicon
1.2.1 History of Metal-Assisted Chemical Etching of Silicon
1.2.2 Mechanism of Metal-Assisted Chemical Etching of Silicon
1.3 Fabrication and Optical Properties of Black Silicon by MacEtch of Silicon
1.3.1 Background of Black Silicon by MacEtch of Silicon
1.3.2 Developments on MacEtch Black Silicon Fabrication Techniques
1.4 Photovoltaic Solar Cell Applications of MacEtch Black Silicon
1.4.1 Silicon Nanowire/Nanohole-Based MacEtch Black Silicon for Photovoltaic Solar Cells
1.4.2 Alkaline Treatment Modified MacEtch Black Silicon for Photovoltaic Solar Cells
1.4.3 MacEtch Black Silicon for Diamond Sawed mc-Si Photovoltaic Solar Cells
1.4.4 Copper-MacEtch Inverted Pyramid Black Silicon for Photovoltaic Solar Cells
1.5 Concluding Remarks
Acknowledgements
References
2. Alkaline Texturing Vanesa Fano, Juan Carlos Jimeno, José Rubén Gutiérrez and Ma Velia Rodríguez
2.1 Introduction to Alkaline Texturing
2.2 Pyramid Formation
2.2.1 Main Requirements and Theories
2.2.2 Optimizing the Texturing: Shape and Size Aspects
2.3 Chemical Mixtures Used in the Alkaline Texturing
2.3.1 Overview of Chemistries Used for Alkaline Texturing
2.3.2 Most Common Chemistries
2.3.3 Other Mixtures
2.3.4 Challenges to Develop Alkaline Texturing Recipes
2.4 Mechanisms of Alkaline Texturing, Important Parameters Involved in Alkaline Texturing
2.4.1 Influence of Alkaline Concentration
2.4.2 Additives
2.4.2.1 IPA
2.4.2.2 Other Additives
2.4.3 Silicates
2.4.4 Temperature
2.4.5 pH
2.4.6 Process Time
2.4.7 Agitation
2.4.8 Dissolved Gases
2.5 Surface Conditioning Prior to Alkaline Texturing
2.6 Problems Associated to Alkaline Texturing
References
3. Advanced TexturingLixia Yang, Yaoping Liu and Xiaolong Du
3.1 Introduction to Advanced Texturing
3.2 History and Definition of Metal-Assisted Chemical Etching
3.3 Mechanisms of Metal-Assisted Chemical Etching
3.3.1 Reactions of Metal-Assisted Chemical Etching
3.3.2 Redox System of Metal-Assisted Chemical Etching
3.4 Methods of Metal-Assisted Chemical Etching
3.4.1 Two-Step Metal-Assisted Chemical Etching Process
3.4.2 One-Step Metal-Assisted Chemical Etching
3.5 Copper-Assisted Chemical Etching
3.5.1 Copper-Assisted Chemical Etching of c-Si
3.5.2 Copper-Assisted Chemical Etching of m-Si
3.6 Conclusion
References 109
4. Wet Chemical Cleaning for Industrial ApplicationFlorian Buchholz, Eckard Wefringhaus and Martin Plettig
4.1 Introduction
4.2 Status of Production Technology in Solar Cell Manufacturing
4.3 Wet Chemical Process Technology
4.3.1 Tools
4.3.2 Etching
4.3.3 Cleaning
4.3.4 Rinsing and Drying
4.3.5 Process Integration
4.4 Contamination Management
4.4.1 Measurement of Surface Contamination
4.4.2 As-Cut Wafer
4.4.3 Alkaline Etching
4.4.4 Contaminants of Interest and Their Threshold Values
4.4.5 Organic Contamination
4.4.6 Application: Optimization of HF/O3 Cleaning Process
4.5 Cost Considerations
4.6 Conclusion
Acknowledgments
References
5. Analytical Techniques for Wet ProcessingStefanie Wahl and Sylke Meyer
5.1 Introduction
5.1.1 The Importance of Chemical Analysis on Silicon Surfaces
5.1.2 Impact of Surface Contaminations on the Solar Cell Process
5.1.3 Methods for the Determination of Surface Contaminations
5.2 Metal Analysis by ICP-MS
5.2.1 Sandwich Method
5.2.2 Droplet Scan Method
5.2.3 Immersion Method
5.2.4 Sequential Etching Methods
5.3 Index Determination of Organic Contaminations
5.3.1 SE-TOC
5.3.2 Contact Angle Mapping
5.3.3 TD-GC-MS
Acknowledgments
References
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