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Submit a ProposalHybrid Micromachining and Microfabrication Technologies
 | Principles, Varieties and Applications Edited by Sandip Kunar, Golam Kibria, Prasenjit Chatterjee and Asma Perveen Series: Innovations in Materials and Manufacturing Copyright: 2023 | Status: Published ISBN: 9781394174478 | Hardcover | 336 pages | 112 illustrations Price: $195 USD  |
One Line Description
The book aims to provide a thorough understanding of numerous advanced hybrid micromachining and microfabrication techniques as well as future directions, providing researchers and engineers who work in hybrid micromachining with a much-appreciated orientation.
Audience
Mechanical, production, manufacturing, and automation industry engineers as well as researchers and (post) graduate students in the same disciplines.
Mechanical, production, manufacturing, and automation industry engineers as well as researchers and (post) graduate students in the same disciplines.
Description
The book is dedicated to advanced hybrid micromachining and microfabrication technologies by detailing principals, techniques, processes, conditions, research advances, research challenges, and opportunities for various types of advanced hybrid micromachining and microfabrication. It discusses the mechanisms of material removal supported by experimental validation. Constructional features of hybrid micromachining setup suitable for industrial micromachining applications are explained. Separate chapters are devoted to different advanced hybrid micromachining and microfabrication to design and development of micro-tools, which is one of the most vital components in advanced hybrid micromachining, and which can also be used for various micro and nano applications. Power supply, and other major factors which influence advanced hybrid micromachining processes, are covered and research findings concerning the improvement of machining accuracy and efficiency are reported.
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The book is dedicated to advanced hybrid micromachining and microfabrication technologies by detailing principals, techniques, processes, conditions, research advances, research challenges, and opportunities for various types of advanced hybrid micromachining and microfabrication. It discusses the mechanisms of material removal supported by experimental validation. Constructional features of hybrid micromachining setup suitable for industrial micromachining applications are explained. Separate chapters are devoted to different advanced hybrid micromachining and microfabrication to design and development of micro-tools, which is one of the most vital components in advanced hybrid micromachining, and which can also be used for various micro and nano applications. Power supply, and other major factors which influence advanced hybrid micromachining processes, are covered and research findings concerning the improvement of machining accuracy and efficiency are reported.
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Author / Editor Details
Sandip Kunar, PhD, is an assistant professor in the Department of Mechanical Engineering, Aditya Engineering College, India. His research interests include non-conventional machining processes, micromachining processes, advanced manufacturing technology, and industrial engineering. He has published more than 50 research papers in various international journals and conferences as well as two patents.
Sandip Kunar, PhD, is an assistant professor in the Department of Mechanical Engineering, Aditya Engineering College, India. His research interests include non-conventional machining processes, micromachining processes, advanced manufacturing technology, and industrial engineering. He has published more than 50 research papers in various international journals and conferences as well as two patents.
Golam Kibria, PhD, is an assistant professor in the Department of Mechanical Engineering at Aliah University, Kolkata, India. He has worked as Senior Research Fellow (SRF) in the Council of Scientific & Industrial Research (CSIR) and his research interests include non-conventional machining processes, micromachining, and advanced manufacturing and forming technology.
Prasenjit Chatterjee, PhD, is a full professor of Mechanical Engineering and Dean (Research and Consultancy) at MCKV Institute of Engineering, West Bengal, India. He has more than 120 research papers in various international journals and peer-reviewed conferences. He has authored and edited over 22 books on intelligent decision-making, fuzzy computing, supply chain management, optimization techniques, risk management, and sustainability modeling. Dr. Chatterjee is one of the developers of a new multiple-criteria decision-making method called Measurement of Alternatives and Ranking according to Compromise Solution (MARCOS).
Asma Perveen, PhD, is an assistant professor in the Mechanical & Aerospace Engineering Department at Nazarbayev University, Kazakhstan. She earned her PhD from the National University of Singapore and worked as a research scientist at the Singapore Institute of Manufacturing Technology for over two years. Her research interests are in EDM, hybrid machining processes, additive manufacturing, polymer extrusion, and non-conventional machining processes.
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Table of Contents
Preface
Acknowledgement
1. Overview of Hybrid Micromachining and Microfabrication Techniques
Sandip Kunar, Akhilesh Kumar Singh, Devarapalli Raviteja, Golam Kibria, Prasenjit Chatterjee, Asma Perveen and Norfazillah Talib
1.1 Introduction
1.2 Classification of Hybrid Micromachining and Microfabrication Techniques
1.2.1 Compound Processes
1.2.2 Methods Aided by Various Energy Sources
1.2.3 Processing Using a Hybrid Tool
1.3 Challenges in Hybrid Micromachining
1.4 Conclusions
1.5 Future Research Opportunities
References
2. A Review on Experimental Studies in Electrochemical Discharge Machining
Pravin Pawar, Amaresh Kumar and Raj Ballav
2.1 Introduction
2.2 Historical Background
2.3 Principle of Electrochemical Discharge Machining Process
2.4 Basic Mechanism of Electrochemical Discharge Machining Process
2.5 Application of ECDM Process
2.6 Literature Review on ECDM
2.6.1 Literature Review on Theoretical Modeling
2.6.2 Literature Review on Internal Behavioral Studies
2.6.3 Literature Review on Design of ECDM
2.6.4 Literature Review on Workpiece Materials Used in ECDM
2.6.5 Literature Review on Tooling Materials and Its Design in ECDM
2.6.6 Literature Review on Electrolyte Chemicals Used in ECDM
2.6.7 Literature Review on Optimization Techniques Used in ECDM
2.7 Conclusion
Acknowledgments
References
3. Laser-Assisted Micromilling
Asma Perveen, Sandip Kunar, Golam Kibria and Prasenjit Chatterjee
3.1 Introduction
3.2 Laser-Assisted Micromilling
3.2.1 Laser-Assisted Micromilling of Steel Alloys
3.2.2 Laser-Assisted Micromilling of Titanium Alloys
3.2.3 Laser-Assisted Micromilling of Ni Alloys
3.2.4 Laser-Assisted Micromilling of Cementite Carbide
3.2.5 Laser-Assisted Micromilling of Ceramics
3.3 Conclusion
References
4. Ultrasonic-Assisted Electrochemical Micromachining
Sandip Kunar, Itha Veeranjaneyulu, S. Rama Sree, Asma Perveen, Norfazillah Talib, Sreenivasa Reddy Medapati and K.V.S.R. Murthy
4.1 Introduction
4.2 Ultrasonic Effect
4.2.1 Pumping Effect
4.2.2 Cavitation Effect
4.3 Experimental Procedure
4.4 Results and Discussion
4.4.1 Effect of Traditional Electrochemical Micromachining
4.4.2 Effect of Electrolyte Jet During Micropatterning
4.4.3 Effect of Ultrasonic Assistance During Micropatterning
4.4.4 Effect of Ultrasonic Amplitude During Micropatterning
4.4.5 Influence of Working Voltage During Micropatterning
4.4.6 Influence of Pulse-Off Time During Micropatterning
4.4.7 Influence of Electrode Feed Rate During Micropatterning
4.5 Conclusions
References
5. Micro-Electrochemical Piercing on SS 204
Manas Barman, Premangshu Mukhopadhyay and Goutam Kumar Bose
5.1 Introduction
5.2 Experimentation on SS 204 Plates With Cu Tool Electrodes
5.3 Results and Discussions
5.4 Conclusions
References
6. Laser-Assisted Electrochemical Discharge Micromachining
Sandip Kunar, Kagithapu Rajendra, V. V. D. Praveen Kalepu, Prasenjit Chatterjee, Asma Perveen, Norfazillah Talib and K.V.S.R. Murthy
6.1 Introduction
6.2 Experimental Procedure
6.3 Results and Discussion
6.3.1 ECDM Pre-Process
6.3.2 Laser Pre-Process
6.4 Conclusions
References
7. Laser-Assisted Hybrid Micromachining Processes and Its Applications
Ravindra Nath Yadav
7.1 Introduction
7.2 Laser-Assisted Hybrid Micromachining
7.3 Laser-Assisted Traditional-HMMPs
7.3.1 Laser-Assisted Microturning Process
7.3.2 Laser-Assisted Microdrilling Process
7.3.3 Laser-Assisted Micromilling Process
7.3.4 Laser-Assisted Microgrinding Process
7.4 Laser-Assisted Nontraditional HMMPs
7.4.1 Laser-Assisted Electrodischarge Micromachining
7.4.2 Laser-Assisted Electrochemical Micromachining
7.4.3 Laser-Assisted Electrochemical Spark Micromachining
7.4.4 Laser-Assisted Water Jet Micromachining
7.5 Capabilities and Shortfalls of LA-HMMPs
7.6 Conclusion
Acknowledgment
References
8. Hybrid Laser-Assisted Jet Electrochemical Micromachining Process
Sivakumar M., J. Jerald, Shriram S., Jayanth S. and N. S. Balaji
8.1 Introduction
8.2 Overview of Electrochemical Machining
8.3 Importance of Electrochemical Micromachining
8.4 Fundamentals of Electrochemical Micromachining
8.4.1 Electrochemistry of Electrochemical Micromachining
8.4.2 Mechanism of Material Removal
8.5 Major Factors of EMM
8.5.1 Nature of Power Supply
8.5.2 Interelectrode Gap (IEG)
8.5.3 Temperature, Concentration, and Electrolyte Flow
8.6 Jet Electrochemical Micromachining
8.7 Laser as Assisting Process
8.8 Laser-Assisted Jet Electrochemical Micromachining (LA-JECM)
8.8.1 Working Principles of LAJECM
8.8.2 Mechanism of Material Removal
8.8.3 Materials
8.8.4 Theoretical and Experimental Method for Process Energy Distribution
8.8.5 LAJECM Process Temperature
8.8.6 Material Removal Rate and Taper Angle
8.8.7 LAJECM and JECM Comparison
8.8.8 Machining Precision
8.8.8.1 Geometry Precision
8.8.8.2 Profile Surface Roughness
8.9 Applications of LAJECM
References
9. Ultrasonic Vibration-Assisted Microwire Electrochemical Discharge Machining
Sandip Kunar, Kagithapu Rajendra, Devarapalli Raviteja, Norfazillah Talib, S. Rama Sree and M.S. Reddy
9.1 Introduction
9.2 Experimental Setup
9.3 Results and Discussion
9.3.1 Influence of Ultrasonic Amplitude on Micro Slit Width
9.3.2 Influence of Voltage on Micro Slit Width
9.3.3 Effect of Duty Ratio on Micro Slit Width
9.3.4 Influence of Frequency on Slit Width
9.3.5 Analysis of Micro Slits
9.4 Conclusions
References
10. Study of Soda-Lime Glass Machinability by Gunmetal Tool in Electrochemical Discharge Machining and Process Parameters Optimization Using Grey Relational Analysis
Pravin Pawar, Amaresh Kumar and Raj Ballav
10.1 Introduction
10.2 Experimental Conditions
10.3 Analysis of Average MRR of Workpiece (Soda-Lime Glass) Through Gunmetal Electrode
10.3.1 ANOVA for Average MRR
10.3.2 Influence of Input Factors on Average MRR
10.4 Analysis of Average Depth of Machined Hole on Soda-Lime Glass Through Gunmetal Electrode
10.4.1 ANOVA for Average Machined Depth
10.4.2 Influence of Input Factors on Average Machined Depth
10.5 Analysis of Average Diameter of Hole of Soda-Lime Glass Through Gunmetal Electrode
10.5.1 ANOVA for Average Hole Diameter
10.5.2 Influence of Input Factors on Average Hole Diameter
10.6 Grey Relational Analysis Optimization of Soda-Lime Glass Results by Gunmetal Electrode
10.6.1 Methodology of Grey Relational Analysis
10.6.2 Data Pre-Processing
10.6.3 Grey Relational Generating
10.6.4 Deviation Sequence
10.6.5 Grey Relational Coefficient
10.6.6 Grey Relational Grade
10.7 Conclusion
Acknowledgments
References
11. Micro Turbine Generator Combined with Silicon Structure and Ceramic Magnetic Circuit
Minami Kaneko and Fumio Uchikoba
11.1 Introduction
11.2 Concept
11.3 Fabrication Technology
11.3.1 Microfabrication Technology of Silicon Material
11.3.2 Multilayer Ceramic Technology
11.4 Designs and Experiments
11.4.1 Designs of Turbine and Magnetic Circuit for Single-Phase Type
11.4.2 Designs of Turbine and Magnetic Circuit for Three-Phase Type
11.4.3 Rotational Experiment and Rotor Blade Design
11.4.4 Low Boiling Point Fluid and Experiment
11.5 Results and Discussion
11.5.1 Fabricated Evaluation
11.5.2 Rotational Result
11.5.3 Comparison of Rotor Shape and Rotational Motion
11.5.4 Phase Change
11.6 Conclusions
Acknowledgment
References
12. A Review on Hybrid Micromachining Process and Technologies
Akhilesh Kumar Singh, Sandip Kunar, M. Zubairuddin, Pramod Kumar, Marxim Rahula Bharathi B., P.V. Elumalai, M. Murugan and Yarrapragada K.S.S. Rao
12.1 Introduction
12.2 Characteristics of Hybrid-Micromachining
12.3 Bibliometric Survey of Micromachining to Hybrid-Micromachining
12.4 Material Removal in Microsizes
12.5 Nontraditional Hybrid-Micromachining Technologies
12.6 Classification of Techniques Used for Micromachining to Hybrid-Micromachining
12.6.1 Classification According to Material Removal Hybrid-Micromachining Phenomena
12.6.2 Classification According to Categories Based on Material Removal Accuracy
12.6.3 Classification According to Hybrid-Micromachining Purposes
12.6.4 Classification of Hybrid Micromanufacturing Processes
12.7 Materials Are Used and Application of Hybrid-Micromachining
12.8 Conclusions
References
13. Material Removal in Spark-Assisted Chemical Engraving for Micromachining
Sumanta Banerjee
13.1 Introduction
13.2 Essentials of SACE
13.2.1 Instances of SACE Micromachining
13.3 Genesis of SACE Acronym: A Brief Historical Survey
13.4 SACE: A Viable Micromachining Technology
13.4.1 Mechanical μ-Machining Techniques
13.4.2 Chemical μ-Machining Methods
13.4.3 Thermal μ-Machining Methods
13.5 Material Removal Mechanism in SACE μ-Machining
13.5.1 General Aspects
13.5.2 Micromachining at Shallow Depths
13.5.3 Micromachining at High Depths
13.5.4 Micromachining by Chemical Reaction
13.6 SACE μ-Machining Process Control
13.6.1 Analysis of Process
13.6.2 Etch Promotion
13.7 Conclusion and Scope for Future Work
References
Index
Back to Top
Preface
Acknowledgement
1. Overview of Hybrid Micromachining and Microfabrication Techniques
Sandip Kunar, Akhilesh Kumar Singh, Devarapalli Raviteja, Golam Kibria, Prasenjit Chatterjee, Asma Perveen and Norfazillah Talib
1.1 Introduction
1.2 Classification of Hybrid Micromachining and Microfabrication Techniques
1.2.1 Compound Processes
1.2.2 Methods Aided by Various Energy Sources
1.2.3 Processing Using a Hybrid Tool
1.3 Challenges in Hybrid Micromachining
1.4 Conclusions
1.5 Future Research Opportunities
References
2. A Review on Experimental Studies in Electrochemical Discharge Machining
Pravin Pawar, Amaresh Kumar and Raj Ballav
2.1 Introduction
2.2 Historical Background
2.3 Principle of Electrochemical Discharge Machining Process
2.4 Basic Mechanism of Electrochemical Discharge Machining Process
2.5 Application of ECDM Process
2.6 Literature Review on ECDM
2.6.1 Literature Review on Theoretical Modeling
2.6.2 Literature Review on Internal Behavioral Studies
2.6.3 Literature Review on Design of ECDM
2.6.4 Literature Review on Workpiece Materials Used in ECDM
2.6.5 Literature Review on Tooling Materials and Its Design in ECDM
2.6.6 Literature Review on Electrolyte Chemicals Used in ECDM
2.6.7 Literature Review on Optimization Techniques Used in ECDM
2.7 Conclusion
Acknowledgments
References
3. Laser-Assisted Micromilling
Asma Perveen, Sandip Kunar, Golam Kibria and Prasenjit Chatterjee
3.1 Introduction
3.2 Laser-Assisted Micromilling
3.2.1 Laser-Assisted Micromilling of Steel Alloys
3.2.2 Laser-Assisted Micromilling of Titanium Alloys
3.2.3 Laser-Assisted Micromilling of Ni Alloys
3.2.4 Laser-Assisted Micromilling of Cementite Carbide
3.2.5 Laser-Assisted Micromilling of Ceramics
3.3 Conclusion
References
4. Ultrasonic-Assisted Electrochemical Micromachining
Sandip Kunar, Itha Veeranjaneyulu, S. Rama Sree, Asma Perveen, Norfazillah Talib, Sreenivasa Reddy Medapati and K.V.S.R. Murthy
4.1 Introduction
4.2 Ultrasonic Effect
4.2.1 Pumping Effect
4.2.2 Cavitation Effect
4.3 Experimental Procedure
4.4 Results and Discussion
4.4.1 Effect of Traditional Electrochemical Micromachining
4.4.2 Effect of Electrolyte Jet During Micropatterning
4.4.3 Effect of Ultrasonic Assistance During Micropatterning
4.4.4 Effect of Ultrasonic Amplitude During Micropatterning
4.4.5 Influence of Working Voltage During Micropatterning
4.4.6 Influence of Pulse-Off Time During Micropatterning
4.4.7 Influence of Electrode Feed Rate During Micropatterning
4.5 Conclusions
References
5. Micro-Electrochemical Piercing on SS 204
Manas Barman, Premangshu Mukhopadhyay and Goutam Kumar Bose
5.1 Introduction
5.2 Experimentation on SS 204 Plates With Cu Tool Electrodes
5.3 Results and Discussions
5.4 Conclusions
References
6. Laser-Assisted Electrochemical Discharge Micromachining
Sandip Kunar, Kagithapu Rajendra, V. V. D. Praveen Kalepu, Prasenjit Chatterjee, Asma Perveen, Norfazillah Talib and K.V.S.R. Murthy
6.1 Introduction
6.2 Experimental Procedure
6.3 Results and Discussion
6.3.1 ECDM Pre-Process
6.3.2 Laser Pre-Process
6.4 Conclusions
References
7. Laser-Assisted Hybrid Micromachining Processes and Its Applications
Ravindra Nath Yadav
7.1 Introduction
7.2 Laser-Assisted Hybrid Micromachining
7.3 Laser-Assisted Traditional-HMMPs
7.3.1 Laser-Assisted Microturning Process
7.3.2 Laser-Assisted Microdrilling Process
7.3.3 Laser-Assisted Micromilling Process
7.3.4 Laser-Assisted Microgrinding Process
7.4 Laser-Assisted Nontraditional HMMPs
7.4.1 Laser-Assisted Electrodischarge Micromachining
7.4.2 Laser-Assisted Electrochemical Micromachining
7.4.3 Laser-Assisted Electrochemical Spark Micromachining
7.4.4 Laser-Assisted Water Jet Micromachining
7.5 Capabilities and Shortfalls of LA-HMMPs
7.6 Conclusion
Acknowledgment
References
8. Hybrid Laser-Assisted Jet Electrochemical Micromachining Process
Sivakumar M., J. Jerald, Shriram S., Jayanth S. and N. S. Balaji
8.1 Introduction
8.2 Overview of Electrochemical Machining
8.3 Importance of Electrochemical Micromachining
8.4 Fundamentals of Electrochemical Micromachining
8.4.1 Electrochemistry of Electrochemical Micromachining
8.4.2 Mechanism of Material Removal
8.5 Major Factors of EMM
8.5.1 Nature of Power Supply
8.5.2 Interelectrode Gap (IEG)
8.5.3 Temperature, Concentration, and Electrolyte Flow
8.6 Jet Electrochemical Micromachining
8.7 Laser as Assisting Process
8.8 Laser-Assisted Jet Electrochemical Micromachining (LA-JECM)
8.8.1 Working Principles of LAJECM
8.8.2 Mechanism of Material Removal
8.8.3 Materials
8.8.4 Theoretical and Experimental Method for Process Energy Distribution
8.8.5 LAJECM Process Temperature
8.8.6 Material Removal Rate and Taper Angle
8.8.7 LAJECM and JECM Comparison
8.8.8 Machining Precision
8.8.8.1 Geometry Precision
8.8.8.2 Profile Surface Roughness
8.9 Applications of LAJECM
References
9. Ultrasonic Vibration-Assisted Microwire Electrochemical Discharge Machining
Sandip Kunar, Kagithapu Rajendra, Devarapalli Raviteja, Norfazillah Talib, S. Rama Sree and M.S. Reddy
9.1 Introduction
9.2 Experimental Setup
9.3 Results and Discussion
9.3.1 Influence of Ultrasonic Amplitude on Micro Slit Width
9.3.2 Influence of Voltage on Micro Slit Width
9.3.3 Effect of Duty Ratio on Micro Slit Width
9.3.4 Influence of Frequency on Slit Width
9.3.5 Analysis of Micro Slits
9.4 Conclusions
References
10. Study of Soda-Lime Glass Machinability by Gunmetal Tool in Electrochemical Discharge Machining and Process Parameters Optimization Using Grey Relational Analysis
Pravin Pawar, Amaresh Kumar and Raj Ballav
10.1 Introduction
10.2 Experimental Conditions
10.3 Analysis of Average MRR of Workpiece (Soda-Lime Glass) Through Gunmetal Electrode
10.3.1 ANOVA for Average MRR
10.3.2 Influence of Input Factors on Average MRR
10.4 Analysis of Average Depth of Machined Hole on Soda-Lime Glass Through Gunmetal Electrode
10.4.1 ANOVA for Average Machined Depth
10.4.2 Influence of Input Factors on Average Machined Depth
10.5 Analysis of Average Diameter of Hole of Soda-Lime Glass Through Gunmetal Electrode
10.5.1 ANOVA for Average Hole Diameter
10.5.2 Influence of Input Factors on Average Hole Diameter
10.6 Grey Relational Analysis Optimization of Soda-Lime Glass Results by Gunmetal Electrode
10.6.1 Methodology of Grey Relational Analysis
10.6.2 Data Pre-Processing
10.6.3 Grey Relational Generating
10.6.4 Deviation Sequence
10.6.5 Grey Relational Coefficient
10.6.6 Grey Relational Grade
10.7 Conclusion
Acknowledgments
References
11. Micro Turbine Generator Combined with Silicon Structure and Ceramic Magnetic Circuit
Minami Kaneko and Fumio Uchikoba
11.1 Introduction
11.2 Concept
11.3 Fabrication Technology
11.3.1 Microfabrication Technology of Silicon Material
11.3.2 Multilayer Ceramic Technology
11.4 Designs and Experiments
11.4.1 Designs of Turbine and Magnetic Circuit for Single-Phase Type
11.4.2 Designs of Turbine and Magnetic Circuit for Three-Phase Type
11.4.3 Rotational Experiment and Rotor Blade Design
11.4.4 Low Boiling Point Fluid and Experiment
11.5 Results and Discussion
11.5.1 Fabricated Evaluation
11.5.2 Rotational Result
11.5.3 Comparison of Rotor Shape and Rotational Motion
11.5.4 Phase Change
11.6 Conclusions
Acknowledgment
References
12. A Review on Hybrid Micromachining Process and Technologies
Akhilesh Kumar Singh, Sandip Kunar, M. Zubairuddin, Pramod Kumar, Marxim Rahula Bharathi B., P.V. Elumalai, M. Murugan and Yarrapragada K.S.S. Rao
12.1 Introduction
12.2 Characteristics of Hybrid-Micromachining
12.3 Bibliometric Survey of Micromachining to Hybrid-Micromachining
12.4 Material Removal in Microsizes
12.5 Nontraditional Hybrid-Micromachining Technologies
12.6 Classification of Techniques Used for Micromachining to Hybrid-Micromachining
12.6.1 Classification According to Material Removal Hybrid-Micromachining Phenomena
12.6.2 Classification According to Categories Based on Material Removal Accuracy
12.6.3 Classification According to Hybrid-Micromachining Purposes
12.6.4 Classification of Hybrid Micromanufacturing Processes
12.7 Materials Are Used and Application of Hybrid-Micromachining
12.8 Conclusions
References
13. Material Removal in Spark-Assisted Chemical Engraving for Micromachining
Sumanta Banerjee
13.1 Introduction
13.2 Essentials of SACE
13.2.1 Instances of SACE Micromachining
13.3 Genesis of SACE Acronym: A Brief Historical Survey
13.4 SACE: A Viable Micromachining Technology
13.4.1 Mechanical μ-Machining Techniques
13.4.2 Chemical μ-Machining Methods
13.4.3 Thermal μ-Machining Methods
13.5 Material Removal Mechanism in SACE μ-Machining
13.5.1 General Aspects
13.5.2 Micromachining at Shallow Depths
13.5.3 Micromachining at High Depths
13.5.4 Micromachining by Chemical Reaction
13.6 SACE μ-Machining Process Control
13.6.1 Analysis of Process
13.6.2 Etch Promotion
13.7 Conclusion and Scope for Future Work
References
Index
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